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    Ultra pure water system for semiconductor and packaging industries

    Ultra pure water system for semiconductor and packaging industries

    The resistivity of 18.25M Ω· cm is considered the optimal theoretical water quality indicator for ultrapure water. With the development of the microelectronics industry, using only this indicator to measure ultrapure water is far from enough. Particles in ultrapure water TOC、 Dissolved oxygen, silicon dioxide, bacteria, and other PPT grade metal ions have become the main factors affecting the quality and yield of products in the microelectronics industry and other industries.

    Typical process flow in the semiconductor industry

     

    ASTM Water Quality Standards for Ultra Pure Water in the Electronic Semiconductor Industry in the United States

    Parameter

    Type E-1

    Type E-1.1

    Type E-1.2

    Linewidth(microns)

    1.0-0.5

    0.5-0.25

    0.25-0.18

    Resistivity,25℃

    18.2

    18.2

    18.2

    *Temperature

     

     

     

    *Pressure

     

     

     

    Endotoxin unit(EU/ml)

    0.03

    0.03

    0.03

    TOC(μg/L)

    5

    2

    1

    Dissolved oxygen(μg/L)

    1

    1

    1

    Residue after evaporation(μg/L)

    1

    0.5

    0.1

    SEM particles/L(micron range)

     

     

     

    0.1-0.2

    1000

    1000

    200

    0.2-0.5

    500

    500

    100

    0.5-0.1

    50

    50

    1

    10

    -

     

    -

    On-line particles/L(micron range)

     

     

     

    Particles(>0.05micron)

     

     

     

    0.05-0.1

    500

    500

    100

    0.1-0.2

    300

    300

    50

    0.2-0.3

    50

    50

    20

    0.3-0.5

    20

    20

    10

    >0.5

    4

    4

    1

    Bacteria/100 mL

     

     

     

    100ml Sample

    1

    1

    1

    1L Sample

    1

    1

    0.1

    Silica

     

     

     

     

     

     

     

    Silica-total(μg/L)

    3

    0.5

    0.5

    Silica-dissolved(μg/L)

    1

    0.1

    0.05

    lons and metals(μg/L)

     

     

     

    Ammonium

    0.1

    0.10

    0.05

    Bromide

    0.1

    0.05

    0.02

    Chloride

    0.1

    0.05

    0.02

    Fluoride

    0.1

    0.05

    0.03

    Nitrate

    0.1

    0.05

    0.02

    Nitrite

    0.1

    0.05

    0.02

    Phosphate

    0.1

    0.05

    0.02

    Sulfate

    0.1

    0.05

    0.02

    Aluminum

    0.05

    0.02

    0.005

    Barium

    0.05

    0.02

    0.001

    Boron

    0.05

    0.02

    0.005

    Calcium

    0.05

    0.02

    0.002

    Chromium

    0.05

    0.02

    0.002

    Copper

    0.05

    0.02

    0.002

    Iron

    0.05

    0.02

    0.002

    Lead

    0.05

    0.02

    0.005

    Lithium

    0.05

    0.02

    0.003

    Magnesium

    0.05

    0.02

    0.002

    Manganese

    0.05

    0.02

    0.002

    Nicke

    0.05

    0.02

    0.002

    Potassium

    0.05

    0.02

    0.005

    Sodium

    0.05

    0.02

    0.005

    Strontium

    0.05

    0.02

    0.001

    Zinc

    0.05

    0.02

    0.002

     

     

     

     

    *Temperature and pressure values to be determined
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